首页> 外文期刊>Nuclear Instruments & Methods in Physics Research >Effect of swift heavy ion irradiation on the surface morphology of highly c-axis oriented LSMO thin films grown by pulsed laser deposition
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Effect of swift heavy ion irradiation on the surface morphology of highly c-axis oriented LSMO thin films grown by pulsed laser deposition

机译:快速重离子辐照对脉冲激光沉积生长高c轴取向LSMO薄膜表面形貌的影响

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摘要

A detailed investigation of the surface morphology of the pristine and swift heavy ion (SHI) irradiated La_(0.7)Sr_(0.3)MnO_3 (LSMO) thin film using atomic force microscope (AFM) is presented. Highly c-axis oriented LSMO thin films were grown on LaAlO_3 (100) (LAO) substrates by the pulsed laser deposition (PLD) technique. The films were annealed at 800℃ for 12 h in air (pristine films) and subsequently, irradiated with SHI of oxygen and silver. The incident fluence was varied from 1×10~(12) to 1×10~(14) ions/cm~2 and 1 × 10~(11) to 1×10~(12) ions/cm~2 for oxygen and silver ions, respectively. X-ray diffraction (XRD) studies reveal that the irradiated films are strained. From the AFM images, various details pertaining to the surface morphology such as rms roughness (σ), the surface rms roughness averaged over an infinite large image (σ_∞), fractal dimension (D_F) and the lateral coherence length (ξ) were estimated using the length dependent variance measurements. In case of irradiated films, the surface morphology shows drastic modifications, which is dependent on the nature of ions and the incident fluence. However, the surface is found to remain self-affine in each case. In case of oxygen ion irradiated films both, σ_∞ and D_F are observed to increase with fluence up to a dose value of 1 × 10~(13) ions/cm~2. With further increase in dose value both σ_∞ and D_F decreases. In case of silver ion irradiated films, σ_∞ and D_F decrease with increase in fluence value in the range studied.
机译:利用原子力显微镜(AFM)对原始和快速重离子(SHI)辐照的La_(0.7)Sr_(0.3)MnO_3(LSMO)薄膜的表面形貌进行了详细研究。通过脉冲激光沉积(PLD)技术在LaAlO_3(100)(LAO)衬底上生长高度c轴取向的LSMO薄膜。将膜在空气中(原始膜)在800℃下退火12小时,然后用氧和银的SHI辐照。氧气和氧气的入射通量从1×10〜(12)到1×10〜(14)离子/ cm〜2变化,从1×10〜(11)到1×10〜(12)离子/ cm〜2变化。银离子。 X射线衍射(XRD)研究表明,辐照膜变形。从AFM图像中,可以估算出与表面形态有关的各种细节,例如均方根粗糙度(σ),在无限大图像上平均的表面均方根粗糙度(σ_∞),分形维数(D_F)和横向相干长度(ξ)。使用与长度有关的方差测量。对于受辐照的薄膜,其表面形态会发生剧烈变化,这取决于离子的性质和入射通量。然而,发现在每种情况下表面都保持自仿射。在用氧离子辐照的情况下,观察到σ_∞和D_F随注量的增加而增加,直至剂量值达到1×10〜(13)离子/ cm〜2。随着剂量值的进一步增加,σ_∞和D_F均减小。在银离子辐照薄膜的情况下,在所研究的范围内,σ_∞和D_F随注量值的增加而降低。

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