Capacity limits and matching properties of integrated capacitors

摘要

Theoretical limits for the capacitance density of integratedncapacitors with combined lateral and vertical field components arenderived. These limits are used to investigate the efficiency of variousncapacitive structures such as lateral flux and quasifractal capacitors.nThis study leads to two new capacitor structures with high lateral-fieldnefficiencies. These new capacitors demonstrate larger capacities,nsuperior matching properties, tighter tolerances, and highernself-resonance frequencies than the standard horizontal parallel platenand previously reported lateral-field capacitors, while maintainingncomparable quality factors. These superior qualities are verified bynsimulation and experimental results