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Trapping phenomena in AlGaN/GaN HEMTs: a study based on pulsed and transient measurements

机译:AlGaN / GaN HEMT中的陷阱现象:基于脉冲和瞬态测量的研究

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摘要

Slow trapping phenomenon in AlGaN/GaN HEMTs has been extensively analyzed and described in this paper. Thanks to a detailed investigation, based on a combined pulsed and transient investigation of the current/voltage characteristics (carried out over on an 8-decade time scale), we report a detailed description of the properties of trap levels located in the gate-drain surface, and in the region under the gate of AlGaN/GaN HEMTs. More specifically, the following, relevant results have been identified: (i) the presence of surface trap states may determine a significant current collapse, and reduction of the peak transconductance. During a current transient measurement, the emission of electrons trapped at surface states proceeds through hopping, as demonstrated by means of temperature-dependent measurements. The activation energy of the de-trapping process is equal to 99 meV. (ii) The presence of a high density of defects under the gate may induce a significant shift in the threshold voltage, when devices are submitted to pulsed transconductance measurements. The traps responsible for this process have an activation energy of 0.63 eV, and are detected only on samples with high gate leakage, since gate current allows for a more effective charging/de-charging of the defects.
机译:本文对AlGaN / GaN HEMT中的慢俘获现象进行了广泛的分析和描述。得益于详细的研究,基于对电流/电压特性的脉冲和瞬态组合研究(在8个十年的时间尺度上进行),我们报告了对位于栅极漏极中的陷阱能级特性的详细描述表面,以及在AlGaN / GaN HEMT栅极下方的区域中。更具体地,已经确定了以下相关结果:(i)表面陷阱态的存在可以确定明显的电流崩塌和峰值跨导的减小。在电流瞬态测量过程中,捕获在表面态的电子的发射会通过跳变进行,如依赖于温度的测量所证明的那样。去阱过程的活化能等于99meV。 (ii)当器件进行脉冲跨导测量时,栅极下方高密度缺陷的存在可能会导致阈值电压发生明显变化。负责此过程的陷阱的激活能为0.63 eV,并且仅在栅极泄漏较高的样品上才能检测到,因为栅极电流可以对缺陷进行更有效的充电/放电。

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  • 来源
    《Semiconductor science and technology》 |2013年第7期|21.1-21.8|共8页
  • 作者单位

    Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131 Padova, Italy,Italian Universities Nano-Electronics Team (IUNET), 40125 Bologna, Italy;

    Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131 Padova, Italy;

    Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131 Padova, Italy;

    Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131 Padova, Italy;

    Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131 Padova, Italy;

    University of California at Santa Barbara, Electrical & Computer Engineering Department,Engineering and Sciences Building 2215, Santa Barbara, CA 93106, USA;

    Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131 Padova, Italy,Italian Universities Nano-Electronics Team (IUNET), 40125 Bologna, Italy;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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  • 入库时间 2022-08-18 01:30:50

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