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机译:以原子层沉积的ZrO_2作为栅极电介质的化学气相沉积单层MoS2顶栅MOSFET
Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Kowloon, Hong Kong, Peoples R China;
Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Kowloon, Hong Kong, Peoples R China;
Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Kowloon, Hong Kong, Peoples R China;
Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Kowloon, Hong Kong, Peoples R China;
atomic layer deposition; ZrO2; MoS2; top-gate transistor;
机译:$ hbox {MoS} _ {2} $双栅极MOSFET,具有沉积原子层的$ hbox {Al} _ {2} hbox {O} _ {3} $作为顶部栅极电介质
机译:以原子层沉积的Al2O3作为栅极电介质的GaN MOSFET的研究
机译:使用原子层沉积的HfO_2作为栅极电介质的GaN MOSFET中的漏极电流增强和可忽略的电流崩塌
机译:顶级单层MOS_2 MOSFET采用低温ALD形成ZRO_2栅极电介质
机译:用于深亚微米MOSFET技术的快速热化学气相沉积侧壁间隔电介质。
机译:紫外臭氧处理对MoS2单层的影响:化学气相沉积多晶薄膜与机械剥离单晶薄片的比较
机译:具有原子层沉积ZrO2AS栅极电介质的化学气相沉积单层MOS2TOP栅极MOSFET