Closed-Loop Control of Copper Damascene Electroplating Solutions

摘要

With the damascene process gaining full acceptance in the high-volume manufacturing process for the next generation of semiconductors, reliable metrology is of utmost importance. CVS has shown that it is a highly accurate and precise method for the control of the organic additives, Closed-loop control enhances dosing sys-tem performance and prevents undesirable deterioration in plating solution quality.