High quality YBCO superconductive thin films fabricated by laser molecular beam epitaxy

摘要

High quality YBa_2Cu_3O_6+x (YBCO) superconductive thin films have been fabricated on the SrTiO_3 (100) substrate using laser molecular beam epitaxy (laser-MBE). The active oxygen source Was used. Which made the necessary ambient oxygen pressure be 2-3 orders lower than that in Pulsed laser deposition (PLD). T_c is 85-87 K, and J_c-1.0×10~6 A/cm~2. Atomic force microscopy (AFM) measurements show that no obvious particulates can be observed and the root mean square roughness is 7.8 nm. High stability DC superconducting quantum interference devices (DC-SQUID) was fabricated using this YBCO thin film.