A novel design of a 3-PRC translational compliant parallel micromanipulator for nanomanipulation

摘要

A novel 3-DOF prismatic-revolute-cylindrical (PRC) translational compliant parallel micromanipulator (CPM) has been designed for 3-D nanomanipulation in this paper. The system is configured by a proper selection of hardware and analyzed via the established pseudo-rigid-body (PRB) model. The CPM workspace is determined taking into account the physical constraints imposed by piezoelectric actuators and flexure hinges.