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Gas Source Molecular Beam Epitaxy of Compound Semiconductors

机译:化合物半导体的气源分子束外延

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The emphasis of the research program which utilizes the chemical beam epitaxy laboratory revolves primarily around the epitaxial growth of a wide variety of compound semiconductors (both Ⅱ-Ⅵ and Ⅲ-Ⅴ), as well as multilayered structures composed of Ⅱ-Ⅵ/Ⅱ-Ⅵ, Ⅱ-Ⅵ/Ⅲ-Ⅴ and Ⅲ-Ⅴ/Ⅲ-Ⅴ heterostruc-tures. The chemical beam epitaxy laboratory consists of two gaseous source epitaxy reactors (Ⅱ-Ⅵ-dedicated and Ⅲ-Ⅴ-dedicated) interconnected to several smaller chambers which are used for sample introduction and in-situ surface analysis and metallization. Such a multichamber epitaxy system allows the fabrication of the aforementioned heter-ostructures to be accomplished within a continuous ultrahigh vacuum environment.
机译:利用化学束外延实验室的研究计划的重点主要围绕多种化合物半导体(Ⅱ-Ⅵ和Ⅲ-Ⅴ)的外延生长以及由Ⅱ-Ⅵ/Ⅱ-组成的多层结构。 Ⅵ,Ⅱ-Ⅵ/Ⅲ-Ⅴ和Ⅲ-Ⅴ/Ⅲ-Ⅴ异质结构。化学束外延实验室由两个气态源外延反应器(Ⅱ-Ⅵ专用和Ⅲ-Ⅴ专用)组成,这些反应器与几个较小的腔室互连,用于样品引入,原位表面分析和金属化。这种多室外延系统允许在连续的超高真空环境中完成上述异质结构的制造。

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