共振型マイクロ加速度センサに関する研究（第1報）:基本詏計と20倍拡大モデルによる原理検証

摘要

Sensors that detect the mechanical quantity are shifting from the bulk type to the MEMS type for the miniaturization, the cost reduction, and high reliability. Regarding the acceleration sensor, the resistance type and the capacitance type made by the MEMS technology have been commercialized. However, the sensitivity is still a weak point to those sensors. It is considered that there is an advantage of sensitivity in the resonance type because the mechanical resonance is used. In this study, we clarified the relation between sensitivity and the size concerning the newly designed resonance type acceleration sensor by the numerical simulation. Next we evaluated the sensor characteristics with the 20-times enlarged model. As a conclusion, it was confirmed that the resonance type had a potential for realizing the high sensitivity micro acceleration sensor.%力学量を検出するセンサは，小型化低コスト化，高信頼性実rn現のためにバルク型から半導体プロセスを応用したMEMSセンサrnへ移行してぃる．力学センサの一つである加速度センサも，抵抗rn値変化や静電容量変化により加速度を検出するタイプのものrnが，MEMSにより実用に供されるようになってぃる．しかしながら，rn小型化に伴う出力低下を補う高感度化が依然として課題となっrnてぃる．