基于三梁结构的电热驱动谐振式微加速度传感器研究

摘要

为了提高电热激励/压阻拾振谐振式微加速度传感器的品质因数和消除交叉灵敏度,提出一种基于三梁结构的新设计.依据有限元模拟得到的固有振型来选择三梁结构参数,以减少能量耗散,提高品质因数.分析本设计消除交叉灵敏度的机制和独特的三梁结构的激振方式并对其进行有限元模拟.模拟结果证实这种谐振式微加速度传感器的灵敏度高于1000 Hz/g.%To enhance the quality factor and eliminate cross-sensitivity of electrothermally driven resonant microaccelerometer, a novel design based on triple-beam structure has been proposed. Based on intrinsic vibrating shape of triple-beam resonator derived from FEA(finite element analysis) structural optimization of triple-beam structure has been conducted. The mechanism of eliminating cross-sensitivity and exciting three microbeams respectively has been analyzed. This device is verified by means of FEA simulation which asserts that the sensitivity of this design is more than 1000 Hz/g.