Microplasma Jets Generated by Arrays of Microchannels Fabricated in Flexible Molded Plastic

摘要

Novel microplasma jet devices have been fabricated in a moldable polymer that is resilient, transparent, and flexible. With a layer-by-layer assembly process involving a mold and initially undercured polymer, arrays of plasma microjets as large as 5 $times$ 2 have been constructed and demonstrated to date. Having a channel diameter of $340 pm 5 muhbox{m}$ and a single gas feed 4 mm in diameter for the entire array, the microchannel jets extend $sim$3.6 mm into laboratory air for a He gas flow rate of $sim$4.6 standard liters per minute.