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首页> 外文期刊>Physica status solidi >A practical MOCVD approach to the growth of Pr_(1-x)Ca_xMnO_3 films on single crystal substrates
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A practical MOCVD approach to the growth of Pr_(1-x)Ca_xMnO_3 films on single crystal substrates

机译:在单晶衬底上生长Pr_(1-x)Ca_xMnO_3膜的实用MOCVD方法

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摘要

Pr_(1-x)Ca_xMnO_3 thin films have been deposited through an in situ metal organic chemical vapor deposition (MOCVD) process using a molten multi-metal source, consisting of the Pr(hfa)_3-diglyme, Ca(hfa)_2-tetraglyme, and Mn(tmhd)_3 precursor mixture on single crystal substrates such as LaAlO_3 (001) and MgO (001). Optimization of processing parameters has allowed the deposition of homogeneous thin films in morphology, composition, and thickness. The effect of substrate has been assessed in relation to structure and morphology. Field emission scanning electron microscope of a Pr_(0.7)Ca_(0.3)MnO_3 filrn deposited at 1000 ℃ on MgO (001).
机译:已使用熔融多金属源通过原位金属有机化学气相沉积(MOCVD)工艺沉积了Pr_(1-x)Ca_xMnO_3薄膜,该多金属源包括Pr(hfa)_3-二甘醇二甲醚Ca(hfa)_2-四甘醇二甲醚和Mn(tmhd)_3前体混合物在单晶衬底上,如LaAlO_3(001)和MgO(001)。通过优化工艺参数,可以沉积出形态,组成和厚度均匀的薄膜。已经评估了底物的作用与结构和形态的关系。在1000℃下沉积在MgO(001)上的Pr_(0.7)Ca_(0.3)MnO_3膜的场发射扫描电子显微镜。

著录项

  • 来源
    《Physica status solidi》 |2015年第7期|1550-1555|共6页
  • 作者单位

    Dipartimento di Scienze Chimiche, Universita degli Studi di Catania, INSTM UdR Catania, 95125 Catania, Italy;

    ISMN-CNR Area della Ricerca di Roma Via Salaria Km 29,300, 00016 Monterotondo Scalo, Roma, Italy;

    Dipartimento di Scienze Chimiche, Universita degli Studi di Catania, INSTM UdR Catania, 95125 Catania, Italy;

    Istituto per la Microelettronica e Microsistemi IMM-CNR, Strada Ⅷ n. 5, 95121 Catania, Italy;

    Dipartimento di Scienze Chimiche, Universita degli Studi di Catania, INSTM UdR Catania, 95125 Catania, Italy;

    Dipartimento di Scienze Chimiche, Universita degli Studi di Catania, INSTM UdR Catania, 95125 Catania, Italy;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    manganites; MOCVD; perovskites; Pr_(1-x)Ca_xMnO_3; thin films;

    机译:锰矿;MOCVD;钙钛矿Pr_(1-x)Ca_xMnO_3;薄膜;

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