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Effect of deuterium ion beam irradiation onto the mirror-like pulsed laser deposited thin films of rhodium

机译:氘离子束辐照对镜面脉冲激光沉积铑薄膜的影响

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The effect of deuterium ion beam irradiation on the reflectivity of mirror-like pulsed laser deposited (PLD) thin film of rhodium is reported. The deposition parameters; target-substrate distance and background helium gas pressure were optimized to obtain the good quality rhodium films, of higher thickness, oriented preferentially in (111) plane. The rhodium thin films deposited at optimum PLD parameters were exposed to 10,20, and 30 keV deuterium ion beam. The changes in surface morphology and UV-Visible-FIR reflectivity of mirror-like rhodium thin films, as a function of energy of deuterium ion beam, after exposure are reported.
机译:报道了氘离子束辐照对镜面脉冲激光沉积(铑)薄膜的反射率的影响。沉积参数;优化目标衬底的距离和背景氦气压力以获得高质量的铑膜,该膜的厚度较大,优先在(111)平面上取向。将以最佳PLD参数沉积的铑薄膜暴露于10,20和30 keV氘离子束中。据报道,曝光后,镜面铑薄膜的表面形貌和紫外可见FIR反射率随氘离子束能量的变化而变化。

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