机译:使用UV-LIGA技术的静电悬浮微陀螺仪的设计和制造
Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education National Key Laboratory of Nano/Micro Fabrication Technology Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University 200240 Shanghai People’s Republic of China;
Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education National Key Laboratory of Nano/Micro Fabrication Technology Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University 200240 Shanghai People’s Republic of China;
Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education National Key Laboratory of Nano/Micro Fabrication Technology Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University 200240 Shanghai People’s Republic of China;
Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education National Key Laboratory of Nano/Micro Fabrication Technology Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University 200240 Shanghai People’s Republic of China;
Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education National Key Laboratory of Nano/Micro Fabrication Technology Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University 200240 Shanghai People’s Republic of China;
Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education National Key Laboratory of Nano/Micro Fabrication Technology Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University 200240 Shanghai People’s Republic of China;
机译:基于SU-8 UV-LIGA技术的新型140 GHz折叠波导的设计,制造和测量
机译:使用UV-LIGA工艺制造带有独立电极和屏蔽膜的静电透镜阵列
机译:垂直静电梳状驱动器的V形光束悬挂的共振扫描微镜的设计与制造
机译:静电悬浮微陀螺仪的优化设计
机译:UV-LIGA惯性型静电传感器的微制造及其应用。
机译:微机械静电悬浮六轴加速度计的设计制作和悬浮实验
机译:微机械静电悬浮六轴加速度计的设计,制作和悬浮实验
机译:用于使用平面制造技术制造的微型陀螺仪的磁悬浮轮