Double-cantilever device for Atomic Force Microscopy in dynamic noncontact-mode

摘要

Future failure analysis might have the task to contact nanoscopic structures at more than one point to measure potential, current, and carrier distributions. Then, a scanning probe actuator with two or more tips will be necessary. Design and functionality of a double-cantilever sensor and capacitive actuator for the Atomic Force Microscopy (AFM) in dynamic non-contact-mode are presented in this contribution. The independent control of the single sensor parts allows selective vertical movement and separate force detection for each tip. The separation of the single tip vibrations is realized over pre-designed resonance differences of the two levers. Various excitation and detection modes for the cantilever vibrations have been tested and surface topographies of equivalent surface areas imaged with two tips in overlap are presented.