Double-cantilever device for Atomic Force microscopy in dynamic noncontact-mode

摘要

Future failure analysis might have the task to contact nanoscopic structures at more than one point to measure potential, current, and carrier distributions. Then, a scanning probe actuator with two or more tips will be necessary. Design and functionality of a double-cantilever sensor and capacitive actuator for the Atomic Force Microscopy (AFM) in dynamic non-contact-mode are presented in this contribution. The independent control of the single sensor parts allows selective vertical movement and separate force detection for each tip.