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A novel on-wafer approach to test the stability of GaN-based devices in hard switching conditions: Study of hot-electron effects

机译:一种新型的晶圆方法,以测试硬质切换条件下的GaN基器件的稳定性:热电子效应的研究

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摘要

In this work, a novel system to investigate the stability of GaN-based HEMT devices is presented and used to investigate hot-electron effects. The developed system is used to study the impact of hard switching on the dynamic on-resistance of such devices. In particular, we were able to obtain (on-wafer level) a very fast turn-ON commutation with dV(DS)/dt approximate to 10 V/ns (representative of realistic conditions) thanks to the low parasitics at the drain node. As a result, a realistic performance assessment of the dynamic stress of GaN power HEMTs is now available on wafer level, thus shortening the technology development loop. By intentionally tuning the capacitance at the drain node we can accurately control the amount of energy/charge released during each hard switching event, thus being able to evaluate the impact of increasing stress conditions on the devices. The results indicate that even if the hard-switching lasts few nanoseconds, it significantly impacts the dynamic RDSON: we conclude that hot-electron trapping can occur in ns-time scale.
机译:在这项工作中,提出了一种研究基于GaN的HEMT器件的稳定性的新系统,并用于研究热电子效果。开发系统用于研究硬切换对这种装置的动态电阻的影响。特别是,由于漏极节点的低寄生剂,我们能够获得(晶圆水平)与DV(DS)/ DT(代表现实条件)的非常快的开启换向。结果,现在在晶圆水平上提供了GaN电力HEMT的动态应力的现实性能评估,从而缩短了技术开发回路。通过故意调整漏极节点处的电容,我们可以精确地控制每个硬切换事件期间释放的能量/电荷量,从而能够评估增加压力条件对器件的影响。结果表明,即使硬切换持续少数纳秒,它也会显着影响动态RDSON:我们得出结论,热电子捕获可以在NS - 时间尺度中发生。

著录项

  • 来源
    《Microelectronics & Reliability》 |2020年第11期|113830.1-113830.5|共5页
  • 作者单位

    Univ Padua Dept Informat Engn Via Gradenigo 6-B I-35131 Padua Italy;

    Univ Padua Dept Informat Engn Via Gradenigo 6-B I-35131 Padua Italy;

    Univ Padua Dept Informat Engn Via Gradenigo 6-B I-35131 Padua Italy;

    Univ Padua Dept Informat Engn Via Gradenigo 6-B I-35131 Padua Italy;

    Univ Padua Dept Informat Engn Via Gradenigo 6-B I-35131 Padua Italy;

    Univ Padua Dept Informat Engn Via Gradenigo 6-B I-35131 Padua Italy;

    Univ Padua Dept Informat Engn Via Gradenigo 6-B I-35131 Padua Italy;

    Infineon Technol Austria Siemensstr 2 A-9500 Villach Austria;

    Infineon Technol Austria Siemensstr 2 A-9500 Villach Austria;

    Infineon Technol Austria Siemensstr 2 A-9500 Villach Austria;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
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