Simulation and comparison of MOS inversion layer quantum mechanics effects in SiGe PMOSFET and Si PMOSFET

摘要

By employing the semiconductor device 2D simulator Medici, the inversion layer quantum mechanics effects (QME) in the strained SiGe-channel PMOSFET are studied. The influences of the inversion layer QME on the channel hole sheet density, the surface potential, the electric field and the threshold voltage in strained SiGe PMOS and Si PMOS are simulated and compared. It is theoretically predicted and validated by the numeric simulation results that QME lead to much difference in device performance between SiGe PMOS and Si PMOS. This study shows that SiGe PMOS suffers less disadvantageous influence when compared with Si PMOS, in ultra-deep submicron dimension, where QME are becoming increasingly more important.