Columnar shaped microresonators for mass detection and gas analysis

摘要

In this paper miniaturized silicon columns mounted perpendicular to a surface are presented as microresonators for the detection of an exceedingly small mass. In a first sensor design the column resides on a rigid silicon substrate and is forced to oscillate in the first flexural eigenmode. Mass sensitivity was investigated loading a single latex sphere on the top surface of the column and detecting the frequency shift of the resonant frequency. Oscillation was monitored using the optical beam deflection method, focusing a laser beam at the same surface. However, optical readout was substantially hampered by scattering of the laser beam at the loaded particles and diffraction at the column surface. In a second optimized design a silicon column was mounted on a flexible silicon nitride membrane. In this way the optical readout was applied from the flip side of the membrane completely separating the load area and the optical beam path. A proof of principal is given for the optimized sensor design investigating the influence of pure gases on the extrinsic damping behavior of the membrane columnar oscillator.