High frequency columnar silicon microresonators for mass detection

摘要

A simple but effective technological scheme for the fabrication of high frequency silicon columnar microresonators is presented. With the proposed technique the dimensions of the microresonators are controlled on a scale of at least 1 μm. Characterization of the mechanical properties of silicon columns gave resonant frequencies of the lowest flexural mode of 3-7 MHz with quality factors of up to 2500 in air and ～8800 under vacuum condition. Columnar microresonators were operated as mass balance with a sensitivity of 1 Hz/fg. A mass detection limit of 25 fg was deduced from experiments.