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机译:使用光学计量的定向自组装图案的高通量光栅鉴定
Imec vzw, Kapeldreef 75, B-3001 Leuven, Belgium;
Imec vzw, Kapeldreef 75, B-3001 Leuven, Belgium,KULeuven, Department of Electrical Engineering (ESAT), Kasteelpark Arenberg 10, B-3001 Leuven, Belgium,Institute for Molecular Engineering, University of Chicago, 5747 South Ellis Avenue, Jones 217, Chicago, IL 60637, USA;
Imec vzw, Kapeldreef 75, B-3001 Leuven, Belgium;
Imec vzw, Kapeldreef 75, B-3001 Leuven, Belgium;
Imec vzw, Kapeldreef 75, B-3001 Leuven, Belgium;
AZ Electronic Materials, 70 Meister Avenue, Branchburg, NJ 08876, USA;
AZ Electronic Materials, 70 Meister Avenue, Branchburg, NJ 08876, USA;
Institute for Molecular Engineering, University of Chicago, 5747 South Ellis Avenue, Jones 217, Chicago, IL 60637, USA;
Metrology; Directed self-assembly; Line/space patterns; Chemo-epitaxy;
机译:高通量光栅资格,可通过光学计量对定向自组装图形性能进行评级
机译:高通量光栅资格,可通过光学计量对定向自组装图形性能进行评级
机译:用于定向自组装辅助接触孔收缩的光学临界尺寸计量
机译:用于大规模生产的定向自组装(DSA)模式的快速3D表征的新型计量方法
机译:用于基于Mueller矩阵光谱椭偏仪的散射法进行定向自组装构图的光学计量学。
机译:光纤布拉格光栅计量的循环法
机译:使用光学计量评定定向自组装模式性能的高吞吐光栅资格
机译:用于Xmm光栅光谱仪的反射光栅阵列的电光面包板模型的开发,制造和计量