角度计量中三光栅光学系统应用分析

摘要

在目前的角度计量工作中普遍采用光电轴角编码器作为测角器件,而光栅系统由于具有分辨率高、稳定性好、出错率低、环境适应性强等特点而得到了计量界的认可.结合计量工作误差处理严谨、不确定度来源分析透彻的要求,在分析了三光栅光学系统原理的基础上,提出了针对其正弦输出信号的自适应滤波方法.%The photoelectric rotary encoder is commonly used as angle measuring device in the current angle metrological work. However, the grating-system has been recognized by the metrology field due to its high resolution, good stability, low error rate and good environmental adaptability. To satisfy the requirements of the precise error processing of metrological work and thorough analysis of uncertainty sources, the adaptive filtering method for the sine wave output signal is proposed based on the principle of three-grating system.