机译:基于散硅微机械加上灰度光刻的MEMS微镜的制造
Int Iberian Nanotechnol Lab INL P-4715330 Braga Portugal|Univ Minho Campus Azurem ALGORITMI Ctr P-4800058 Guimaraes Portugal;
Int Iberian Nanotechnol Lab INL P-4715330 Braga Portugal|Univ Minho Campus Azurem ALGORITMI Ctr P-4800058 Guimaraes Portugal;
Int Iberian Nanotechnol Lab INL P-4715330 Braga Portugal;
Int Iberian Nanotechnol Lab INL P-4715330 Braga Portugal;
Int Iberian Nanotechnol Lab INL P-4715330 Braga Portugal|Univ Minho Campus Azurem ALGORITMI Ctr P-4800058 Guimaraes Portugal;
Int Iberian Nanotechnol Lab INL P-4715330 Braga Portugal|Univ Minho Campus Azurem ALGORITMI Ctr P-4800058 Guimaraes Portugal;
Univ Minho Campus Azurem ALGORITMI Ctr P-4800058 Guimaraes Portugal;
Int Iberian Nanotechnol Lab INL P-4715330 Braga Portugal|Univ Minho Campus Azurem ALGORITMI Ctr P-4800058 Guimaraes Portugal;
Mirrors; Electrodes; Lithography; Resists; Micromechanical devices; Actuators; Fabrication; Bulk-micromachining process; grayscale; MEMS mirror; scanner; vertically asymmetric electrodes;
机译:使用MEMS技术制造和评估用于X射线光刻的灰度掩模
机译:利用Mems技术制备和评价X射线光刻用灰度掩模
机译:结合体硅微加工和UV-LIGA技术的多层微结构制造
机译:使用硅体微加工进行平面外直角反射的微镜的设计和制造
机译:铝MEMS微镜的表面微加工制造工艺。
机译:基于一步法无掩模灰度光刻的具有任意表面轮廓的微光学元件的制备
机译:用于在标准硅衬底中制造两级mEms的批量微加工技术