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Journal of Microelectromechanical Systems

Journal of Microelectromechanical Systems

SCIEI

中文名称：微机电系统学报

ISSN：1057-7157
出版周期：Bimonthly

发文量：53

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1.Magnetic Liquid Metal Marble: Characterization of Lyophobicity and Magnetic Manipulation for Switching Applications

机译：Magnetic Liquid Metal Marble: Characterization of Lyophobicity and Magnetic Manipulation for Switching Applications
- 作者：Jeon Jinpyo;Lee Jeong-Bong;Chung Sang KugKim Daeyoung
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2016年第6期
- magnetic liquid metal marble (MLMM);
- non-wetting;
- microfluidics;
- lyophobicity;
- HCl vapor treatment;
- electrical switching;
- Galinstan (R);
2.Fatigue in Nanometric Single-Crystal Silicon Layers and Beams

机译：Fatigue in Nanometric Single-Crystal Silicon Layers and Beams
- 作者：Dellea Stefano;Langfelder Giacomo;Longoni Antonio Francesco
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Fatigue;
- NEMS;
- reliability;
- surface micromachining;
3.Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate

机译：Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate
- 作者：Ahamed Mohammed J.;Senkal Doruk;Trusov Alexander A.Shkel Andrei M.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Microfabrication;
- plasma etching;
- fused quartz;
- fused silica;
- glass etching;
- roughness reduction;
4.Fracture of Polycrystalline 3C-S1C Films in Microelectromechanical Systems

机译：Fracture of Polycrystalline 3C-S1C Films in Microelectromechanical Systems
- 作者：Di Gao;Carlo Carraro;Velimir RadmilovicRoger T. HoweRoya Maboudian
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2004年第6期
- Fracture;
- Microelectromechanical systems (MEMS);
- Silicon carbide;
- Thin films;
5.Electromagnetic Energy Harvester With Flexible Coils and Magnetic Spring for 1-10 Hz Resonance

机译：Electromagnetic Energy Harvester With Flexible Coils and Magnetic Spring for 1-10 Hz Resonance
- 作者：Zhang Qian;Wang Yufeng;Kim Eun Sok
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Electromagnetic vibration-energy harvesting;
- magnetic spring;
- flexible coils;
- magnet array;
- human body motion;
6.A Micromachined Quartz Resonator Array for Biosensing Applications

机译：A Micromachined Quartz Resonator Array for Biosensing Applications
- 作者：Ping Kao;Steffen Doerner;Thomas SchneiderDavid AllaraPeter HauptmannSrinivas Tadigadapa
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Biosensor array;
- Impedance spectrum analyzer;
- Quartz crystal microbalance (QCM);
- Quartz micromachining;
7.Wafer-Level Parylene Packaging With Integrated RF Electronics for Wireless Retinal Prostheses

机译：Wafer-Level Parylene Packaging With Integrated RF Electronics for Wireless Retinal Prostheses
- 作者：Wen Li;Damien C. Rodger;Ellis MengJames D. WeilandMark S. HumayunYu-Chong Tai
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2010年第4期
- Accelerated-lifetime soak testing (ALST);
- Chip packaging;
- Parylene C;
- Radio-frequency (RF) coil;
8.Review of MEMS Electromagnetic Vibration Energy Harvester

机译：Review of MEMS Electromagnetic Vibration Energy Harvester
- 作者：Tan Yushan;Dong Ying;Wang Xiaohao
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2017年第1期
- Electromagnetic energy harvester;
- low frequency;
- wideband frequency;
- integrated fabrication;
9.Simple Fabrication of Metal-Based Piezoelectric MEMS by Direct Deposition of Pb(Zr, Ti)O{sub}3 Thin Films on Titanium Substrates

机译：Simple Fabrication of Metal-Based Piezoelectric MEMS by Direct Deposition of Pb(Zr, Ti)O{sub}3 Thin Films on Titanium Substrates
- 作者：Kensuke Kanda;Isaku Kanno;Hidetoshi KoteraKiyotaka Wasa
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Microactuators;
- Pb(Zr;
- Ti)O{sub}3 (PZT) ceramics;
- Piezoelectricity;
- Thin-film devices;
10.Design and fabrication of submicrometer, single crystal Si Accelerometer

机译：Design and fabrication of submicrometer, single crystal Si Accelerometer
- 作者：Jason W. Weigold;Khalil Najafi;Stella W. Pang
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2001年第4期
- Accelerometer;
- Deep etching;
- Electron beam lithography;
- MEMS;
- Silicon;
11.Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

机译：Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications
- 作者：Mazzalai Andrea;Balma Davide;Chidambaram NachiappanMatloub RaminMuralt Paul
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Piezoelectric;
- actuator;
- setup;
- e(31;
- f);
- stress;
- reliability;
- cantilever;
- displacement;
- lead-zirconate-titanate (PZT);
- aluminum nitride;
12.An angle-based design approach for rectangular electrostatic torsion actuators

机译：An angle-based design approach for rectangular electrostatic torsion actuators
- 作者：Zhixiong Xiao;Xing Tao Wu;Wuyong PengK. R. Farmer
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2001年第4期
- Angle-based design approach;
- Rectangular electrostatic torsion actuators;
13.Bi{sub}2Te{sub}3-Based Flexible Micro Thermoelectric Generator With Optimized Design

机译：Bi{sub}2Te{sub}3-Based Flexible Micro Thermoelectric Generator With Optimized Design
- 作者：Wulf Glatz;Etienne Schwyter;Lukas DurrerChristofer Hierold
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Bi{sup}2Te{sup}3;
- Electrochemical deposition (ECD);
- Power MEMS;
- SU-8;
- Thermoelectric generator;
- 3-D microstructure;
14.Investigation on Mechanically Bistable MEMS Devices for Energy Harvesting From Vibrations

机译：Investigation on Mechanically Bistable MEMS Devices for Energy Harvesting From Vibrations
- 作者：Ando B.;Baglio S.;LEpiscopo G.Trigona C.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
15.A Microfabricated PDMS Microbial Fuel Cell

机译：A Microfabricated PDMS Microbial Fuel Cell
- 作者：Chin-Pang-Billy Siu;Mu Chiao
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2008年第6期
- Biofuel cell;
- Blood glucose;
- Human plasma;
- Microbial fuel cell (MFC);
- Microfabrication;
- Micropillar electrode;
- Polydimethylsiloxane (PDMS);
16.Tungsten-Based SOI Microhotplates for Smart Gas Sensors

机译：Tungsten-Based SOI Microhotplates for Smart Gas Sensors
- 作者：Syed Z. Ali;Florin Udrea;William I. MilneJulian W. Gardner
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2008年第6期
- Gas sensors;
- Microhotplates;
- Silicon on insulator (SOI);
- Tungsten;
17.Adaptive Liquid Lens by Changing Aperture

机译：Adaptive Liquid Lens by Changing Aperture
- 作者：Ren L.;Park S.;Ren H.Yoo I.-S.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Adaptive lens;
- changing aperture;
- focal length;
- liquid;
- resolution;
18.An Optical Method for Strain-Controlled Fatigue Testing of Microspecimens

机译：An Optical Method for Strain-Controlled Fatigue Testing of Microspecimens
- 作者：Kim C.-Y.;Sharpe W. N.;Hemker K. J.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Fatigue;
- optical interferometry;
- strain control;
- strain measurement;
19.Magnetic Self-Assembly of Millimeter-Scale Components With Angular Orientation

机译：Magnetic Self-Assembly of Millimeter-Scale Components With Angular Orientation
- 作者：Sheetal Bhalchandra Shetye;Ilan Eskinazi;David P. Arnold
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2010年第3期
- Angular orientation;
- Embedded magnets;
- Packaging;
- Permanent magnets;
- Self-assembly;
20.Low-Temperature Monolithic Encapsulation Using Porous-Alumina Shell Anodized on Chip

机译：Low-Temperature Monolithic Encapsulation Using Porous-Alumina Shell Anodized on Chip
- 作者：Rihui He;Chang-Jin Kim
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Integrated packaging;
- Low temperature;
- Monolithic encapsulation;
- Porous alumina;
- RF MEMS packaging;
- Thin-film encapsulation;
21.Two-Port Electromechanical Model for Bulk-Piezoelectric Excitation of Surface Micromachined Beam Resonators

机译：Two-Port Electromechanical Model for Bulk-Piezoelectric Excitation of Surface Micromachined Beam Resonators
- 作者：Serhan Ardanuc;Amit Lai
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Anchor coupling;
- Anchor loss;
- Bulk-lead zirconium titanate (PZT) actuation;
- Equivalent circuits;
- Reciprocity principle;
- Resonators;
22.Drift-Free Micromirror Arrays Made of Monocrystalline Silicon for Adaptive Optics Applications

机译：Drift-Free Micromirror Arrays Made of Monocrystalline Silicon for Adaptive Optics Applications
- 作者：Lapisa M.;Zimmer F.;Stemme G.Gehner A.Niklaus F.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Heterogeneous integration;
- mirrors;
- silicon;
- spatial light modulators (SLMs);
- very large scale integration;
- wafer bonding;
- wafer-scale integration;
23.Fabrication Methods and Performance of Low-Permeability Microfluidic Components for a Miniaturized Wearable Drug Delivery System

机译：Fabrication Methods and Performance of Low-Permeability Microfluidic Components for a Miniaturized Wearable Drug Delivery System
- 作者：Mark J. Mescher;Erin E. Leary Swan;Jason FieringMaria E. HolmboeWilliam F. SewellSharon G. KujawaMichael J. McKennaJeffrey T. Borenstein
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Fluidics;
- Implantable biomedical devices;
- Micromachining;
- Permeability;
- Polyimide films;
- Printed-circuit fabrication;
24.Design and Feasibility Analysis of Microscale Bumped Channel With Supersonic Flow for Electronics Cooling

机译：Design and Feasibility Analysis of Microscale Bumped Channel With Supersonic Flow for Electronics Cooling
- 作者：Takahashi Yuya;Chen Lin;Okajima JunnosukeIga YukaKomiya AtsukiFu Wu-ShungMaruyama Shigenao
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2016年第6期
- Electronics cooling;
- heat transfer;
- microscale;
- computational fluid dynamics;
- supersonic flow;
25.High-Throughput On-Chip Large Deformation of Silicon Nanoribbons and Nanowires

机译：High-Throughput On-Chip Large Deformation of Silicon Nanoribbons and Nanowires
- 作者：Passi V.;Bhaskar U.;Pardoen T.Sodervall U.Nilsson B.Petersson G.Hagberg M.Raskin J.-P.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
26.A Flexible Underwater Pressure Sensor Array Using a Conductive Elastomer Strain Gauge

机译：A Flexible Underwater Pressure Sensor Array Using a Conductive Elastomer Strain Gauge
- 作者：Yaul F. M.;Bulovic V.;Lang J. H.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Carbon black;
- conductive elastomer;
- flexible;
- high sensitivity;
- modeling;
- polydimethylsiloxane (PDMS);
- pressure sensor array;
- underwater;
27.Design and Fabrication of DRIE-Patterned Complex Needlelike Silicon Structures

机译：Design and Fabrication of DRIE-Patterned Complex Needlelike Silicon Structures
- 作者：Blaise Laurent Patrick Gassend;Luis Fernando Velasquez-Garcia;Akintunde Ibitayo Akinwande
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2010年第3期
- Deep reactive-ion etching (DRIE);
- Microneedle;
- 3-D microfabrication;
28.A Multimetal Surface Micromachining Process for Tunable RF MEMS Passives

机译：A Multimetal Surface Micromachining Process for Tunable RF MEMS Passives
- 作者：Shim Y.;Wu Z.;Rais-Zadeh M.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- High quality factor;
- RF MEMS;
- surface micromachining;
- tunable passives;
- ultra high frequency;
29.Discharge-Based Pressure Sensors for High-Temperature Applications Using Three-Dimensional and Planar Microstructures

机译：Discharge-Based Pressure Sensors for High-Temperature Applications Using Three-Dimensional and Planar Microstructures
- 作者：Scott A. Wright;Yogesh B. Gianchandani
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Plasma applications;
- Plasma confinement;
- Plasma measurements;
- Plasma properties;
- Pressure effects;
- Sensitivity;
30.An Electrochemical Impedance-Based Thermal Flow Sensor for Physiological Fluids

机译：An Electrochemical Impedance-Based Thermal Flow Sensor for Physiological Fluids
- 作者：Baldwin Alex;Yu Lawrence;Meng Ellis
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2016年第6期
31.Miniature Flipping Disk Device for Size Measurement of Objects Through Endoscope

机译：Miniature Flipping Disk Device for Size Measurement of Objects Through Endoscope
- 作者：Choi W.;Rubtsov V.;Kim C.-J.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Electrostatic actuation;
- endoscope;
- endoscopic observation;
- optical microelectromechanical systems (MEMS);
32.High-Speed MEMS-Based Gas Chromatography

机译：High-Speed MEMS-Based Gas Chromatography
- 作者：Masoud Agah;Gordon Randall Lambertus;Richard SacksKensall Wise
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2006年第5期
- Gas Chromatography (GC) matrix;
- High-speed;
- MEMS;
- Micro gas Chromatography;
- Parallel GC;
- Separation column;
33.Millimeter-Scale Fuel Cell With Onboard Fuel and Passive Control System

机译：Millimeter-Scale Fuel Cell With Onboard Fuel and Passive Control System
- 作者：Saeed Moghaddam;Eakkachai Pengwang;Kevin Y. LinRichard I. MaselMark A. Shannon
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2008年第6期
- Fuel cell;
- Hydrogen generation;
- Metal hydride;
- Microvalve;
- Power source;
- Power source for portable electronics;
34.New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films

机译：New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films
- 作者：Sebastien Gravier;Michael Coulombier;Asmahan SariNicolas AndreAlexandre BoeJean-Pierre RaskinThomas Pardoen
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Mechanical properties;
- Microelectromechanical systems (MEMS);
- MEMS test structures;
- Nanomechanical testing;
- Release;
- Size effect;
- Thin materials;
35.Leak-Tight Piezoelectric Microvalve for High-Pressure Gas Micropropulsion

机译：Leak-Tight Piezoelectric Microvalve for High-Pressure Gas Micropropulsion
- 作者：Eui-Hyeok (EH) Yang;Choonsup Lee;Juergen MuellerThomas George
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2004年第5期
- High pressure;
- Micropropulsion;
- Microvalve;
- Piezoelectric;
36.A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability

机译：A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability
- 作者：Mohammad Faisal Zaman;Ajit Sharma;Zhili HaoFarrokh Ayazi
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2008年第6期
- Mode-matching;
- Silicon-on-insulator (SOI);
- Tuning fork;
- Vibratory microgyroscope;
37.Comb-Drive XYZ-microstage With Large Displacements Based on Chip-Level Microassembly

机译：Comb-Drive XYZ-microstage With Large Displacements Based on Chip-Level Microassembly
- 作者：Xue Gaopeng;Toda Masaya;Ono Takahito
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2016年第6期
38.Simultaneous Remote Sensing of Temperature and Humidity by LC-Type Passive Wireless Sensors

机译：Simultaneous Remote Sensing of Temperature and Humidity by LC-Type Passive Wireless Sensors
- 作者：Ren Qing-Ying;Wang Li-Feng;Huang Jian-QiuZhang CongHuang Qing-An
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Wireless passive sensor;
- multi-function sensor;
- temperature sensor;
- humidity sensor;
- graphene oxide;
39.Temporally Aliased Video Microscopy: An Undersampling Method for In-Plane Modal Analysis of Microelectromechanical Systems

机译：Temporally Aliased Video Microscopy: An Undersampling Method for In-Plane Modal Analysis of Microelectromechanical Systems
- 作者：Yamahata C.;Stranczl M.;Sarajlic E.Krijnen G. J. M.Gijs M. A. M.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
40.Wafer-Scale Microdevice Transfer/Interconnect: Its Application in an AFM-Based Data-Storage System

机译：Wafer-Scale Microdevice Transfer/Interconnect: Its Application in an AFM-Based Data-Storage System
- 作者：Michel Despont;Ute Drechsler;R. YuH. B. PoggeP. Vettiger
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2004年第6期
41.Stress-Minimized Packaging of Inertial Sensors by Double-Sided Bond Wire Attachment

机译：Stress-Minimized Packaging of Inertial Sensors by Double-Sided Bond Wire Attachment
- 作者：Schroder Stephan;Niklaus Frank;Nafari AlexandraWestby Eskild R.Fischer Andreas C.Stemme GoranHaasl Sjord
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
42.Electrothermally Actuated Silicon Carbide Tunable MEMS Resonators

机译：Electrothermally Actuated Silicon Carbide Tunable MEMS Resonators
- 作者：Mastropaolo E.;Wood G. S.;Gual I.Parmiter P.Cheung R.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Actuation;
- electrothermal transduction;
- mixing;
- resonators;
- silicon carbide (SiC);
- tuning;
43.An Application of 3-D MEMS Packaging: Out-of-Plane Quadrupole Mass Filters

机译：An Application of 3-D MEMS Packaging: Out-of-Plane Quadrupole Mass Filters
- 作者：Luis F. Velasquez-Garcia;Kerry Cheung;Akintunde I. Akinwande
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2008年第6期
- Mass filter;
- Out-of-plane quadrupole;
- Second stability region;
- 3-D packaging;
44.Electrostatically Actuated Cantilever With SOI-MEMS Parallel Kinematic XY Stage

机译：Electrostatically Actuated Cantilever With SOI-MEMS Parallel Kinematic XY Stage
- 作者：Jingyan Dong;Placid M. Ferreira
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Active cantilever;
- Comb drive;
- Micropositioning stage;
- Parallel kinematic mechanism (PKM);
- Tilt-plate actuator;
45.Hermeticity Evaluation of Polymer-Sealed MEMS Packages by Gas Diffusion Analysis

机译：Hermeticity Evaluation of Polymer-Sealed MEMS Packages by Gas Diffusion Analysis
- 作者：Changsoo Jang;Arindam Goswami;Bongtae Han
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Gas diffusion;
- Gas-leakage;
- Hermeticity;
- Micro-electromechanical systems (MEMS) package;
- Polymer seals;
46.Packaging and Non-Hermetic Encapsulation Technology for Flip Chip on Implantable MEMS Devices

机译：Packaging and Non-Hermetic Encapsulation Technology for Flip Chip on Implantable MEMS Devices
- 作者：Sutanto J.;Anand S.;Sridharan A.Korb R.Zhou L.Baker M. S.Okandan M.Muthuswamy J.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Actuators;
- biomedical microelectromechanical systems (MEMS) (bio-MEMS);
- flip chip;
- hydrophobic silicone;
- microactuators;
47.Analytical Model of Valveless Micropumps

机译：Analytical Model of Valveless Micropumps
- 作者：Ian Eames;Alireza Azarbadegan;Mehrdad Zangeneh
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第4期
- Fluid flow;
- Fluidics;
- Micropumps;
- Piezoelectric devices;
48.Development of Cavitation in Refrigerant (R-123) Flow Inside Rudimentary Microfluidic Systems

机译：Development of Cavitation in Refrigerant (R-123) Flow Inside Rudimentary Microfluidic Systems
- 作者：Chandan Mishra;Yoav Peles
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2006年第5期
- Cavitation;
- Flow patterns;
- Microelectromechanical systems (MEMS);
- Microfluidics;
- Micro-Venturi;
- Refrigerant;
- Scale effects;
49.Full-Lagrangian Schemes for Dynamic Analysis of Electrostatic MEMS

机译：Full-Lagrangian Schemes for Dynamic Analysis of Electrostatic MEMS
- 作者：Sudipto K. De;N. R. Aluru
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2004年第5期
50.Anelastic Stress Relaxation in Gold Films and Its Impact on Restoring Forces in MEMS Devices

机译：Anelastic Stress Relaxation in Gold Films and Its Impact on Restoring Forces in MEMS Devices
- 作者：X. Yan;W. L. Brown;Y. LiJohn PapapolymerouC. PalegoJ. C. M. HwangR. P. Vinci
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Materials reliability;
- Microelectromechanical devices;
- RF switch;
- Stress measurement;
51.A Hybrid System-Level Modeling and Simulation Methodology for Structurally Complex Microelectromechanical Systems

机译：A Hybrid System-Level Modeling and Simulation Methodology for Structurally Complex Microelectromechanical Systems
- 作者：Xu J.;Yuan W.;Xie J.Chang H.Ma B.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2011年第2期
52.A Miniature Capacitive Micromachined Ultrasonic Transducer Array for Minimally Invasive Photoacoustic Imaging

机译：A Miniature Capacitive Micromachined Ultrasonic Transducer Array for Minimally Invasive Photoacoustic Imaging
- 作者：Xiaoyang Cheng;Jingkuang Chen;Chuan Li
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2010年第4期
- Capacitive micromachined ultrasonic transducer (CMUT);
- Photoacoustic;
- Ultrasound transducer;
53.Optimization of Hot-Wire Airflow Sensors on an Out-of-Plane Glass Bubble for 2-D Detection

机译：Optimization of Hot-Wire Airflow Sensors on an Out-of-Plane Glass Bubble for 2-D Detection
- 作者：Liu Shuwei;Pan Shanshan;Xue FeiNay LinMiao JianminNorford Leslie K.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Airflow sensor;
- fabrication;
- flow pattern;
- glass bubble;
- sensor system;
- 3-D-MEMS;
54.Quantification of Uncertainty in Creep Failure of RF-MEMS Switches

机译：Quantification of Uncertainty in Creep Failure of RF-MEMS Switches
- 作者：Kolis Peter;Bajaj Anil K.;Koslowski Marisol
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2017年第1期
- Coble creep;
- failure;
- RF-MEMS;
- sensitivity;
- uncertainty quantification;
55.A Micromachined Inline-Type Wideband Microwave Power Sensor Based on GaAs MMIC Technology

机译：A Micromachined Inline-Type Wideband Microwave Power Sensor Based on GaAs MMIC Technology
- 作者：Lei Han;Qing-An Huang;Xiao-Ping LiaoShi Su
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- GaAs;
- Micromachining;
- Microwave power sensor;
- Monolithic microwave integrated circuits (MMICs);
56.Nonvolatile Liquid-Film-Embedded Microfluidic Valve for Microscopic Evaporation Control Without Stiction Problem at Liquid–Air Interfaces

机译：Nonvolatile Liquid-Film-Embedded Microfluidic Valve for Microscopic Evaporation Control Without Stiction Problem at Liquid–Air Interfaces
- 作者：Almeida R.;Kwon J. W.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Ejector clogging;
- evaporation control;
- microfluidic valve;
57.Three-Axis Lorentz-Force Magnetic Sensor for Electronic Compass Applications

机译：Three-Axis Lorentz-Force Magnetic Sensor for Electronic Compass Applications
- 作者：Li M.;Rouf V. T.;Thompson M. J.Horsley D. A.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Magnetic sensors;
- magnetometers;
- microelectromechanical devices;
- navigation;
58.Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers

机译：Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers
- 作者：Roy H. Olsson III;Kenneth E. Wojciechowski;Michael S. BakerMelanie R. TuckJames G. Fleming
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Acceleration measurement;
- Acoustic devices;
- Acoustic oscillators;
- Acoustic resonators;
- Acoustic transducers;
- Beams;
59.A Batch-Fabricated Single-Layer Elastomeric Actuator With Corrugated Surface

机译：A Batch-Fabricated Single-Layer Elastomeric Actuator With Corrugated Surface
- 作者：Maleki T.;Chitnis G.;Kim A.Ziaie B.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Carbon grease;
- elastomeric actuators;
- electrostrictive polymers;
- laser micromachining;
- polydimethylsiloxane (PDMS);
60.Gallium-Doped Piezoresistive Sensor With Optimized Focused Ion Beam Implantation

机译：Gallium-Doped Piezoresistive Sensor With Optimized Focused Ion Beam Implantation
- 作者：Sharma Akshdeep;Suma B. N.;Bhat K. N.Naik A. K.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2017年第1期
- FIB implantation;
- gallium;
- gauge factor;
- ion beam applications;
- piezoresistive devices;
61.High-Resolution MEMS Inclinometer Based on Pull-In Voltage

机译：High-Resolution MEMS Inclinometer Based on Pull-In Voltage
- 作者：Alves Filipe Serra;Dias Rosana Alves;Cabral Jorge MiguelGaspar JoaoRocha Luis Alexandre
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Inclinometer;
- MEMS;
- pull-in voltage;
- FPGA;
62.Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems

机译：Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
- 作者：Gkotsis P.;Kilchytska V.;Fragkiadakis C.Kirby P. B.Raskin J.-P.Francis L. A.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第6期
- Dielectric films;
- ferroelectric films;
- material reliability;
- microelectromechanical systems (MEMS);
- neutrons;
- radiation effects;
63.Modeling and Experimental Study of a Low-Frequency-Vibration-Based Power Generator Using ZnO Nanowire Arrays

机译：Modeling and Experimental Study of a Low-Frequency-Vibration-Based Power Generator Using ZnO Nanowire Arrays
- 作者：Yang B.;Lee C.;Ho G. W.Ong W. L.Liu J.Yang C.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Hydrothermal method;
- low frequency;
- power generator;
- vibration;
- zinc oxide (ZnO) nanowires;
64.Polyethersulfone Membrane Coated With Nanoporous Parylene for Ultrafiltration

机译：Polyethersulfone Membrane Coated With Nanoporous Parylene for Ultrafiltration
- 作者：Prihandana G. S.;Ito H.;Nishinaka Y.Kanno Y.Miki N.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第6期
- Nanoporous parylene;
- polyethersulfone (PES) membrane;
- surface modification;
- ultrafiltration;
65.A Microfabricated Nebulizer for Liquid Vaporization in Chemical Analysis

机译：A Microfabricated Nebulizer for Liquid Vaporization in Chemical Analysis
- 作者：Sami Franssila;Seppo Marttila;Kai KolariPekka OstmanTapio KotiahoRisto KostiainenReijo LehtiniemiCarl-Magnus FagerJorma Manninen
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2006年第5期
- Fluidics;
- Infrared imaging;
- Mass spectrometry;
- Micromachining;
- Silicon;
66.Interactions of Adhesion Materials and Annealing Environment on Resistance and Stability of MEMS Platinum Heaters and Temperature Sensors

机译：Interactions of Adhesion Materials and Annealing Environment on Resistance and Stability of MEMS Platinum Heaters and Temperature Sensors
- 作者：Yi Feng;Osborn William;Betz JordanLaVan David A.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Platinum;
- thin film;
- resistance;
- adhesion;
- heater;
- thermometer;
- MEMS;
- stability;
- thermal analysis;
- annealing;
67.Characterization of Wafer-Level Thermocompression Bonds

机译：Characterization of Wafer-Level Thermocompression Bonds
- 作者：Christine H. Tsau;S. Mark Spearing;Martin A. Schmidt
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2004年第6期
- Bond characterization;
- Thermocompression bonding;
- Wafer bonding;
68.The strain gradient effect in microelectromechanical systems (MEMS)

机译：The strain gradient effect in microelectromechanical systems (MEMS)
- 作者：Zhenyu Xue;M. Taher A. Saif;Yonggang Huang
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2002年第1期
- Microelectromechanical systems (MEMS);
- Size effect;
- Strain gradient plasticity;
69.A Piezoactuated Droplet-Dispensing Microfluidic Chip

机译：A Piezoactuated Droplet-Dispensing Microfluidic Chip
- 作者：Mohammed Jalal Ahamed;Sergey I. Gubarenko;Ridha Ben-MradPierre Sullivan
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2010年第1期
- Deoxyribonucleic acid;
- Droplet;
- Ejection characteristics;
- Microdispenser;
- Microfluidics;
- Piezoactuator;
- Plate deflection;
70.Numerical Study of the Impact of Vibration Localization on the Motional Resistance of Weakly Coupled MEMS Resonators

机译：Numerical Study of the Impact of Vibration Localization on the Motional Resistance of Weakly Coupled MEMS Resonators
- 作者：Erbes Andreja;Thiruvenkatanathan Pradyumna;Woodhouse JimSeshia Ashwin A.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Mechanical coupling;
- motional resistance;
- vibration localization;
- mode localization;
- MEMS resonators;
71.A Microresonator Design Based on Nonlinear 1:2 Internal Resonance in Flexural Structural Modes

机译：A Microresonator Design Based on Nonlinear 1:2 Internal Resonance in Flexural Structural Modes
- 作者：Ashwin Vyas;Dimitrios Peroulis;Anil K. Bajaj
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Bifurcation;
- Microresonators;
- Nonlinear oscillators;
- Reduced-order systems;
- Resonator filters;
72.Measurements and modeling of two-phase flow in microchannels with nearly constant heat flux boundary conditions

机译：Measurements and modeling of two-phase flow in microchannels with nearly constant heat flux boundary conditions
- 作者：Lian Zhang;Jae-Mo Koo;Linan JiangMehdi AsheghiKenneth E. GoodsonJuan G. SantiagoThomas W. Kenny
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2002年第1期
- Heat exchanger;
- Microchannel;
- Two-phase cooling;
73.Microfabricated High-Speed Axial-Flux Multiwatt Permanent-Magnet Generators - Part I: Modeling

机译：Microfabricated High-Speed Axial-Flux Multiwatt Permanent-Magnet Generators - Part I: Modeling
- 作者：Sauparna Das;David P. Arnold;Iulica ZanaJin-Woo ParkMark G. AllenJeffrey H. Lang
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2006年第5期
- AC generators;
- Micromachining;
- Permanent-magnet (PM) machines;
- Power microelectromechanical systems (MEMS);
74.Design and Fabrication of Monolithic Multidimensional Data Registration CMOS/MEMS Ink-Jet Printhead

机译：Design and Fabrication of Monolithic Multidimensional Data Registration CMOS/MEMS Ink-Jet Printhead
- 作者：Jian-Chiun Liou;Fan-Gang Tseng;Chi-Ming Huang
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2010年第4期
75.Silica-Encapsulated Nanoparticle Films as Surface Modifications for MEMS

机译：Silica-Encapsulated Nanoparticle Films as Surface Modifications for MEMS
- 作者：Hurst K. M.;Ansari N.;Roberts C. B.Ashurst W. R.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2011年第5期
- Microelectromechanical systems (MEMS);
- nanoparticles;
- stiction;
- surface roughness;
- thin films;
76.Latching micromagnetic relays

机译：Latching micromagnetic relays
- 作者：Meichun Ruan;Jun Shen;Charles B. Wheeler
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2001年第4期
77.Multi-Degree-of-Freedom Thin-Film PZT-Actuated Microrobotic Leg

机译：Multi-Degree-of-Freedom Thin-Film PZT-Actuated Microrobotic Leg
- 作者：Rhee C.-H.;Pulskamp J. S.;Polcawich R. G.Oldham K. R.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第6期
- Actuators;
- lead zirconate titanate (PZT);
- piezoelectric devices;
- robots;
78.Aluminum Nitride Ultrasonic Air-Coupled Actuator

机译：Aluminum Nitride Ultrasonic Air-Coupled Actuator
- 作者：Griffin B. A.;Williams M. D.;Coffman C. S.Sheplak M.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2011年第2期
- Aluminum nitride (AlN);
- diaphragm;
- microelectromechanical systems (MEMS);
- piezoelectric;
- ultrasonic;
79.Estimating the In-Plane Young's Modulus of Polycrystalline Films in MEMS

机译：Estimating the In-Plane Young's Modulus of Polycrystalline Films in MEMS
- 作者：Cantwell P. R.;Kim H.;Schneider M. M.Hsu H.-H.Peroulis D.Stach E. A.Strachan A.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Crystallographic texture;
- Hill;
- MAUD;
- MTEX;
- Reuss;
- Voigt;
- Young's modulus;
- density functional theory (DFT);
- elastic anisotropy;
- fiber texture;
- molecular dynamics (MD);
- preferred orientation;
- single-crystal elastic tensor;
80.Nonlinear Limits for Single-Crystal Silicon Microresonators

机译：Nonlinear Limits for Single-Crystal Silicon Microresonators
- 作者：Ville Kaajakari;Tomi Mattila;Aarne OjaHeikki Seppa
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2004年第5期
- Bifurcation;
- Bulk acoustic wave (BAW) devices;
- Hysteresis;
- Microresonators;
- Nonlinear oscillators;
- Nonlinearities;
- Oscillator noise;
- Oscillators;
- Phase noise;
- Resonators;
81.A Study for the Effect of the PCB Motion on the Dynamics of MEMS Devices Under Mechanical Shock

机译：A Study for the Effect of the PCB Motion on the Dynamics of MEMS Devices Under Mechanical Shock
- 作者：Fadi M. Alsaleem;Mohammad I. Younis;Mahmoud I. Ibrahim
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
82.Low-Cycle to Ultrahigh-Cycle Fatigue Lifetime Measurement of Single-Crystal-Silicon Specimens Using a Microresonator Test Device

机译：Low-Cycle to Ultrahigh-Cycle Fatigue Lifetime Measurement of Single-Crystal-Silicon Specimens Using a Microresonator Test Device
- 作者：Ikehara T.;Tsuchiya T.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第4期
- Fatigue;
- lifetime;
- microelectromechanical systems (MEMS);
- oscillation;
- resonator;
- single crystal silicon (SCS);
83.Model-Based Processing of Microcantilever Sensor Arrays

机译：Model-Based Processing of Microcantilever Sensor Arrays
- 作者：Joseph W. Tringe;David S. Clague;James V. CandyAsher K. SinenskyChristopher LeeRobert E. RuddAlan K. Burnham
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2006年第5期
- Microcantilever;
- Model-based processor (MBP);
- Sensor;
- Signal processing;
84.Cryogenic Etching of Silicon: An Alternative Method for Fabrication of Vertical Microcantilever Master Molds

机译：Cryogenic Etching of Silicon: An Alternative Method for Fabrication of Vertical Microcantilever Master Molds
- 作者：Kweku A. Addae-Mensah;Scott Retterer;Susan R. OpalenikDarrell ThomasNickolay V. LavrikJohn P. Wikswo
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2010年第1期
85.Charge Transfer to MEMS Pressure Sensors By Glow Discharge Plasmas

机译：Charge Transfer to MEMS Pressure Sensors By Glow Discharge Plasmas
- 作者：Timothy M. Betzner
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2006年第5期
- Glow discharges;
- Microsensors;
- Plasmas;
- Pressure measurement;
- Reliability;
86.Moving Polymer Waveguides and Latching Actuator for 2 × 2 MEMS Optical Switch

机译：Moving Polymer Waveguides and Latching Actuator for 2 × 2 MEMS Optical Switch
- 作者：Hao-Bing Liu;Franck Chollet
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第3期
- Microelectromechanical systems (MEMS);
- Optical switch;
- Waveguide;
87.A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers

机译：A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers
- 作者：Lu Yipeng;Heidari Amir;Horsley David A.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Aluminum nitride (AlN);
- piezoelectric;
- ultrasonic;
- transducer;
- micromachined ultrasonic transducer (MUT);
- piezoelectric MUT (PMUT);
88.Chip-Scale Quadrupole Mass Filters for Portable Mass Spectrometry

机译：Chip-Scale Quadrupole Mass Filters for Portable Mass Spectrometry
- 作者：Kerry Cheung;Luis Fernando Velasquez-Garcia;Akintunde Ibitayo Akinwande
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2010年第3期
- Chip-scale quadrupole;
- Mass filter;
- Second stability region;
- Square electrodes;
89.A Waveform Design Method for a Piezo Inkjet Printhead Based on Robust Feedforward Control

机译：A Waveform Design Method for a Piezo Inkjet Printhead Based on Robust Feedforward Control
- 作者：Khalate A. A.;Bombois X.;Scorletti G.Babuska R.Koekebakker S.de Zeeuw W.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2012年第6期
- Inkjet printhead;
- microelectromechanical systems (MEMS);
- optimization;
- robust feedforward control;
90.Active Polymeric Composite Membranes for Localized Actuation and Sensing in Microtransfer Printing

机译：Active Polymeric Composite Membranes for Localized Actuation and Sensing in Microtransfer Printing
- 作者：Ahmed Numair;Dagdeviren Canan;Rogers John A.Ferreira Placid M.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第4期
- Microactuators;
- microassembly;
- micromachining;
- microelectromechanical devices;
- transfer printing;
- active composite;
91.Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array

机译：Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array
- 作者：Andri Schaufelbuhl;N. Schneeberger;Ulrich MunchMarc WaeltiOliver PaulOliver BrandHenry BaltesChristian MenolfiQiuting HuangElko DoeringMarkus Loepfe
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2001年第4期
- Complementary metal-oxide-semiconductor (CMOS);
- Infrared sensor array;
- Thermal imaging;
- Thermoelectric sensor;
92.Novel Structure for a Pneumatically Controlled Flow Regulator With Positive Gain

机译：Novel Structure for a Pneumatically Controlled Flow Regulator With Positive Gain
- 作者：Francisco Perdigones;Antonio Luque;Jose M. Quero
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2010年第5期
- Fluidic microsystems;
- Microactuators;
- Microfluidics;
93.Electrostatic Actuators With Expanded Tuning Range Due to Biaxial Intrinsic Stress Gradients

机译：Electrostatic Actuators With Expanded Tuning Range Due to Biaxial Intrinsic Stress Gradients
- 作者：Gary D. Gray;Matthew J. Morgan;Paul A. Kohl
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2004年第1期
94.A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit

机译：A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit
- 作者：Claudia Comi;Alberto Corigliano;Giacomo LangfelderAntonio LongoniAlessandro TocchioBarbara Simoni
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2010年第5期
- High sensitivity;
- Oscillating circuit;
- Resonant accelerometers;
95.Advantages of Electrostatic Spring Hardening in Biomimetic Hair Flow Sensors

机译：Advantages of Electrostatic Spring Hardening in Biomimetic Hair Flow Sensors
- 作者：Droogendijk Harmen;de Boer Meint J.;Sanders Remco G. P.Krijnen Gijs J. M.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第5期
- Hair flow sensor;
- biomimetics;
- spring hardening;
- electrostatics;
96.Manufacturing and packaging of sensors for their integration in a vertical MCM microsystem for biomedical applications

机译：Manufacturing and packaging of sensors for their integration in a vertical MCM microsystem for biomedical applications
- 作者：Andreas Gotz;Isabel Gracia;Carles CaneAnthony MorrisseyJohn Alderman
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2001年第4期
97.Piezoresistive Feedback Control of a MEMS Thermal Actuator

机译：Piezoresistive Feedback Control of a MEMS Thermal Actuator
- 作者：Robert K. Messenger;Quentin T. Aten;Timothy W. McLainLarry L. Howell
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第6期
- Dynamic response;
- Feedback control;
- Nano-positioning;
- Piezoresistive sensor;
- Thermal actuator;
98.A Biaxial Stretchable Interconnect With Liquid-Alloy-Covered Joints on Elastomeric Substrate

机译：A Biaxial Stretchable Interconnect With Liquid-Alloy-Covered Joints on Elastomeric Substrate
- 作者：Hyun-Joong Kim;Teimour Maleki;Pinghung WeiBabak Ziaie
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2009年第1期
- Polydimethylsiloxane (PDMS);
- Room temperature liquid alloy;
- Smart garment;
- Stretchable interconnect;
- Wearable electronics;
99.High-Aspect-Ratio Metal Microfabrication by Nickel Electroplating of Patterned Carbon Nanotube Forests

机译：High-Aspect-Ratio Metal Microfabrication by Nickel Electroplating of Patterned Carbon Nanotube Forests
- 作者：Barrett Lawrence K.;Barton Dallin J.;Noyce Steven G.Allred David D.Vanfleet Richard R.Davis Robert C.
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2015年第5期
- Magnetic;
- carbon;
- microelectromechanical;
- nickel;
- aspect ratio;
100.Experimental Verification of a Design Methodology for Torsion Actuators Based on a Rapid Pull-In Solver

机译：Experimental Verification of a Design Methodology for Torsion Actuators Based on a Rapid Pull-In Solver
- 作者：Ofir Bochobza-Degani;Yael Nemirovsky
- 期刊名称：《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 | 2004年第1期
- Actuator;
- Experimental;
- Lumped two-degrees-of-freedom (L2DOF);
- Model;
- Pull-in;
- Torsion;

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