A High Resolution Differential Mode-Localized MEMS Accelerometer

摘要

A novel differential configuration of a high-resolution mode-localized resonant SOI-MEMS accelerometer is presented in this paper. An effective maximum scale factor of 11/g and a bias-stability of 2.9 6 mu g is demonstrated. A minimum noise floor of 3 mu g/root Hz is shown for device operation in an optimum working region. A large bandwidth of 350Hz is reported and methods to electronically tune the working bandwidth are described. These results benchmark mode-localized accelerometers favourably with respect to other high-end low-g commercial MEMS accelerometers.