首页> 外文OA文献 >A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators

【2h】

A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators

机译：基于三个电耦合谐振器的局部模式MEMS电势传感器

页面导航

摘要
著录项
相似文献
相关主题

摘要

status: published

机译：状态：已发布

著录项

作者
Zhao Chun; Wood Graham S; Pu Suan Hui; Kraft Michael;
展开▼
作者单位

展开▼
年度 2017
总页数
原文格式 PDF
正文语种 en
中图分类

相似文献

外文文献
中文文献
专利

1. Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators [J] . Lyu Ming, Zhao Jian, Kacem Najib, International journal of non-linear mechanics . 2020,第May期

机译：利用非线性来提高基于静电耦合MEMS谐振器的模式局部质量传感器的灵敏度
2. A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators [J] . J. Giner, A. Uranga, J. L. Munoz-Gamarra, Journal of Micromechanics and Microengineering . 2012,第5期

机译：基于电和机械耦合的CMOS-MEMS谐振器的完全集成的可编程双波段RF滤波器
3. Characterizing coupled MEMS resonators with an electrical resonator [J] . Guowei Tao, Bhaskar Choubey Journal of Physics: Conference Series . 2016,第1期

机译：用电谐振器表征耦合的MEMS谐振器
4. Common mode rejection in electrically coupled MEMS resonators utilizing mode localization for sensor applications [C] . Thiruvenkatanathan P., Yan J., Seshia A.A. Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum . 2009

机译：电耦合MEMS谐振器中的共模抑制，利用模式定位实现传感器应用
5. Electrical Stimulation Based Statistical Calibration Model for MEMS Accelerometer and Other Sensors [D] . Bassi, Ishaan. 2020

机译：基于电气刺激MEMS加速度计和其他传感器的统计校准模型
6. Electrical Design and Evaluation of Asynchronous Serial Bus Communication Network of 48 Sensor Platform LSIs with Single-Ended I/O for Integrated MEMS-LSI Sensors [O] . Chenzhong Shao, Shuji Tanaka, Takahiro Nakayama, 2018

机译：集成MEMS-LSI传感器的48个单端I / O传感器平台LSI的异步串行总线通信网络的电气设计和评估
7. Common mode rejection in electrically coupled MEMS resonators utilizing mode localization for sensor applications [O] . Thiruvenkatanathan Pradyumna, Yan Jize, Seshia A. Ashwin 100

机译：用于传感器应用的模式定位的电耦合mEms谐振器中的共模抑制

A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators

摘要

著录项

相似文献

相关主题

期刊订阅