Integrated design of piezo-actuated 2-DOF submillimeter-range super-resolution platform with self-sensing unit

摘要

This paper reports a novel piezo-actuated two-degrees-of-freedom (2-DOF) super-resolution platform with a self-sensing unit. Because the strain of the piezoelectric material is small, and the displacement of the traditional platform does not meet the requirements. An efficient arrangement is proposed to achieve large-scale travel with fast response times and self-sensing capabilities. In this arrangement, the input unit uses two-stage displacement amplification and the input unit and the output unit are arranged in the shape of the red part of the Union Flag. In addition, the sensing unit is connected to the output unit to realize decoupled output measurements. To predict the relationship between the input and the output accurately, a theoretical model is established for the entire platform and a self-sensing model is also established to obtain the strain-displacement transfer function. These theoretical models were verified via finite element analysis. The experimental results also show that the platform offers large travel with a good decoupling performance whose coupling degree is no more than 1%. The platform has fast dynamic response due to the high natural frequency of 330.83 Hz. In addition, the good sensing performance is reflected by the great linearity and high resolution.