Realtime in-plane displacements tracking of the precision positioning stage based on computer micro-vision

摘要

This study presents a micro-vision-based measurement method for realtime and high accuracy in-plane displacements tracking of the precision positioning stage. In this method, to realize high magnification ratio and high video rate imaging of the measured stage's surface, a micro-vision imaging system is established. In addition, an accelerated inverse optimized searching (AIOS) algorithm is developed in which an optimal template chosen (OTC) strategy and a piecewise update (PU) scheme are proposed and integrated with the IOS method to achieve template matching with high accuracy and high frame rate. Simulation studies are presented to demonstrate the validity of the OTC strategy, PU scheme, and AIOS algorithm, respectively. Experimental results demonstrate that the proposed method can effectively realize displacement measurement of the precision positioning stage at a frequency of hundreds Hertz with accuracy of nanometer degree. (C) 2019 Elsevier Ltd. All rights reserved.