Displacement measurement of the compliant positioning stage based on a computer micro-vision method

摘要

We propose a practical computer micro-vision-based method for displacement measurements of the compliant positioning stage. The algorithm of the proposed method is based on a template matching approach composed of an integer-pixel search and a sub-pixel search. By combining with an optical microscopy, a high resolution CCDcamera and the proposed algorithm, an extremely high measuring precision is achieved. Various simulations and experiments are conducted. The simulation results demonstrate that the matching precision can reach to 0.01 pixel when the noise interference is low. A laser interferometermeasurement system (LIMS) is established for comparison. The experimental results indicate that the proposed method possesses the same performance as the LIMS but exhibits a greater flexibility and operability. The measuring precision can theoretically attain to 2.83 nm/pixel.