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Effect of the Si_3N_4 coating on the mc-Si ingot in the process of multicrystalline silicon purification by metallurgical methods

机译:冶金法纯化多晶硅过程中Si_3N_4涂层对mc-Si锭的影响

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摘要

The Si_3N_4 protective coating has an important impact on avoiding melting silicon from contacting with the crucible wall directly. A mixed Si/Si_3N_4 layer was formed on the interface of silicon and Si_3N_4 coating, and the declination of N content was observed in this mixed layer. With the ingots condition of 1500℃ for 2 h, the large Si_3N_4 and SiC particles appeared in the mixed layer and the formation mechanism was discussed. The Si_3N_4 coating had significantly increased the lifetime of minority carriers by decreasing impurity content.
机译:Si_3N_4保护涂层对于避免熔化的硅直接与坩埚壁接触具有重要影响。在硅和Si_3N_4涂层的界面上形成混合的Si / Si_3N_4层,并且在该混合层中观察到N含量的下降。在1500℃的铸锭条件下2 h,混合层中出现了大的Si_3N_4和SiC颗粒,并讨论了其形成机理。通过降低杂质含量,Si_3N_4涂层显着增加了少数载流子的寿命。

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  • 来源
    《Materials science forum》 |2011年第2期|p.1311-1314|共4页
  • 作者单位

    School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China;

    School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China;

    School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China;

    School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    multicrystalline silicon; Si_3N_4 coating; minority-carrier lifetime;

    机译:多晶硅Si_3N_4涂层;少数载流子寿命;

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