Purification and Size Control of AlN Powder for AlN Single Crystal Growth

摘要

AlN single crystal can be grown by physical vapor transport (PVT) method. The purity and particle size of the source material are important factors for single crystal growth to obtain good quality of AlN single crystal. The aim of this study was purification of AlN powder and growth of its particle size through thermocyclic treatment. The initial particle size was about 1.0 μm and the purity was 98.4% containing 1.6% oxygen and metallic impurities such as Fe, Sn, Ca, Na and Mg etc. which were analyzed based on KSL1612. For purification of AlN powder, it was performed using a mermocycle process with various thermocyclic numbers. After the thermocycle treatment, it is able to obtain large particle size AlN powder as much as 30um and purity was increased to 99.6% based on chemical analysis.