Modeling of high-frequency capacitance-voltage characteristics to quantify trap distributions near SiO2/SiC interfaces

摘要

A procedure to calculate capacitance-voltage (C-V) characteristics from numerical solutions of the Poisson equation for metal-oxide-semiconductor (MOS) capacitors with traps located both at the oxide/semiconductor interface and in the semiconductor is presented. This method is tested for the simple case of a uniform distribution of a single acceptor or donor level in the semiconductor, for which an approximate analytical solution was derived by analogy with the results obtained for a Schottky diode within the depletion approximation. This method is then applied to model the high-frequency C-V curves of n-type 4H- and 6H-SiC MOS capacitors, which show a kink at depletion bias voltages that broadens with decreasing temperature below 150 K. This feature of the high-frequency capacitance occurs at the same temperature and voltage range as a signal detected by constant capacitance deep-level-transient spectroscopy (CCDLTS) measurements and attributed to SiC traps. When only interface traps are considered, the trap energy distribution that is required to reproduce the kink in the C-V curves is not consistent with the trap energy distribution determined from CCDLTS measurements. Numerical simulations show that traps in the SiC epi-layer near the SiO2/SiC interface as well as interface traps with energies close to the SiC conduction band are necessary to explain both the CCDLTS measurement results and the temperature dependence of C–V curves.