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Controlling the Bi content, phase formation, and epitaxial nature of BiMnO_3 thin films fabricated using conventional pulsed laser deposition, hybrid pulsed laser deposition, and solid state epitaxy

机译:控制使用常规脉冲激光沉积,混合脉冲激光沉积和固态外延制备的BiMnO_3薄膜的Bi含量,相形成和外延特性

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摘要

Loss of Bi during thin film growth of bismuth-based compounds is a major challenge to obtaining stoichiometric films. Three approaches to BiMnO_3 film growth were investigated to understand and to control the loss of Bi. First, a systematic study was carried out using a conventional pulsed laser deposition (PLD) approach, using targets of different Bi compositions. Conventional PLD was plagued with high re-evaporation and slow reaction kinetics, which led to Bi-deficient multiphase films. A phenomenological model was developed to describe Bi loss in conventional PLD and demonstrated that the film composition was dependent on both the rate of reaction between the constituent oxides and the rate of desorption of bismuth species from the substrate surface. To overcome the problems of conventional PLD, two different growth approaches were developed: a solid state epitaxy approach, in which stoichiometric but amorphous films deposited at low temperatures (T < 500 ℃) were annealed to generate crystalline films, and a hybrid PLD approach, in which conventional PLD is supplemented with an effusion cell to provide a background flux of Bi. Both of these approaches produced stoichiometric, epitaxial films of BiMnO_3 in a straightforward fashion since the local composition was maintained to the overall stoichiometry during crystallization.
机译:铋基化合物薄膜生长期间Bi的损失是获得化学计量薄膜的主要挑战。研究了三种BiMnO_3薄膜生长方法,以了解和控制Bi的损失。首先,使用常规的脉冲激光沉积(PLD)方法,使用不同Bi组成的靶进行了系统的研究。常规的PLD受高再蒸发和慢的反应动力学困扰,导致Bi缺陷多相膜。建立了一种现象学模型来描述常规PLD中的Bi损失,并证明了膜的组成既取决于组成氧化物之间的反应速率,又取决于铋物种从基材表面的解吸速率。为克服常规PLD的问题,开发了两种不同的生长方法:固态外延方法,其中对在低温(T <500℃)下沉积的化学计量但无定形的薄膜进行退火以生成结晶膜,以及混合PLD方法,其中传统的PLD补充有积液池以提供Bi的背景通量。这两种方法都以简单的方式生产了BiMnO_3的化学计量外延膜,因为在结晶过程中局部组成保持了总体化学计量。

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  • 来源
    《Journal of Applied Physics》 |2009年第12期|123509.1-123509.11|共11页
  • 作者单位

    Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Ave., Pittsburgh, Pennsylvania 15213, USA;

    rnDepartment of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Ave., Pittsburgh, Pennsylvania 15213, USA;

    rnDepartment of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Ave., Pittsburgh, Pennsylvania 15213, USA;

    rnDepartment of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Ave., Pittsburgh, Pennsylvania 15213, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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