Slip planes in monoclinic β-Ga_2O_3 revealed from its {010} face via synchrotron X-ray diffraction and X-ray topography

摘要

Dislocations and their arrays in a {010}-oriented beta-Ga2O3 substrate were observed using synchrotron X-ray diffraction (XRD) and X-ray topography (XRT). The XRD measurements used spatially-resolved omega rocking curves to show that dislocation arrays have a linear contrast with a lower diffraction intensity and a broader full-width at half maximum. Further XRT observations at three different (g) over right arrow vectors resolved these lines as dot contrasts aligned along the four different directions 100 , 102 , 201 , and 001 , which correspond to the outcrops of threading dislocations that lay in four different slip planes. The Burgers vectors for these dislocation arrays were determined using the (g) over right arrow.(b) over right arrow. invisibility criterion. The results indicate there are four slip systems of (1) 010 {001}, (2) 010 {(2) over bar 01}, (3) 201 {10 (2) over bar}, and (4) 001 {100}. The slip system 201 {10 (2) over bar} has not been previously reported. (c) 2020 The Japan Society of Applied Physics