X-RAY TOPOGRAPHY DEVICE BY DOUBLE CRYSTAL METHOD AND X-RAY DIFFRACTION PHOTOGRAPHY USING X-RAY TOPOGRAPHY DEVICE

摘要

PURPOSE: To provide an X-ray topography device according to the double crystal method which can measure the crystal state of the entire surface of a sample with warpage and curvature, etc., of a crystal lattice surface. ;CONSTITUTION: In an X-ray topography device 1 by the double crystal method which causes a bundle of wide X rays from an X-ray source 2 to be diffracted by a single crystal 3, wide diffraction rays from the single crystal 3 to enter each measuring position of a crystal 4 as a sample, the diffraction rays from each measuring position of the crystal 4 to be shot by an image pick-up means 7, and the crystal state of the crystal 4 to be measured, a diffraction condition setting means 10 for satisfying the Bragg's diffraction conditions is provided at each incidence position of the diffraction rays for the crystal 4. This configuration achieves a purpose.;COPYRIGHT: (C)1994,JPO