机译:透射电子束钻孔用于纳米级制造
Graduate School of Engineering Science and Technology, Doctoral Program, National Yunlin University of Science and Technology, Yunlin 640, Taiwan Department of Physics, National Changhua University of Education, Changhua 500, Taiwan;
Department of Physics, National Changhua University of Education, Changhua 500, Taiwan;
Department of Physics, National Changhua University of Education, Changhua 500, Taiwan;
Department of Mechanical Engineering, National Yunlin University of Science and Technology, Yunlin 640, Taiwan;
Department of Physics, National Changhua University of Education, Changhua 500, Taiwan;
机译:负电子束抗蚀剂硬掩模离子束刻蚀工艺用于制造纳米级磁性隧道结
机译:纳米级单电子晶体管制造的新方法:电子束诱导的Pt沉积和隧道势垒的原子层沉积
机译:聚焦电子束在透射电子显微镜中纳米孔钻孔的理论和实验研究
机译:通过电子束诱导工艺可控制地制造纳米级先进功能结构
机译:通过对二嵌段共聚物薄膜进行电子束构图的纳米级磁电子器件。
机译:TEM电子束辐照通过二氧化硅覆盖的微米级Ga球的库仑爆炸制备纳米级Ga球
机译:结合使用自组装分子和电子束光刻技术制造纳米级间隙