Green's function approach for modeling of electrostatic effects in nanoscale fully depleted double-gate silicon-on-insulator metaloxide-semiconductor field-effect transistors

摘要

Exact solution of two-dimensional (2D) Poisson's equation for fully depleted double-gate silicon-on-insulator metal-oxide-semiconductor field-effect transistor is derived using three-zone Green's function solution technique. Framework consists of consideration of source-drain junction curvature. 2D potential profile obtained forms the basis for estimation of threshold voltage. Temperature dependence of front surface potential distribution, back surface potential distribution and front-gate threshold voltage are modeled using temperature sensitive parameters. Applying newly developed model, surface potential and threshold voltage sensitivities to gate oxide thickness have been comprehensively investigated. Device simulation is performed using ATLAS 2D (SILVACO, 4701 Patrick Henry Drive, Bldg. Santa Clara, CA 95054 USA) device simulator, and the results obtained are compared with the proposed 2D model. The model results are found to be in good agreement with the simulated data. Copyright (c) 2013 John Wiley & Sons, Ltd.