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Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators

机译:利用非线性来提高基于静电耦合MEMS谐振器的模式局部质量传感器的灵敏度

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摘要

An ultrasensitive mass sensor is proposed by combining the benefits of mode localization and nonlinear dynamics in two clamped-clamped microbeams of different lengths. The coupling electrostatic stiffness between the two resonators can be tuned for modulating sensitivity, and the actuation voltage applied to the shorter beam can be adjusted in order to overcome mechanical defects such as geometric asymmetry. The analytical dynamic model considering the quadratic and cubic nonlinearities is established and solved by the asymptotic numerical method (ANM) combined with harmonic balance method (HBM), as well as validated by the long-time integration (LTI) method. A parametric study is performed in order to investigate the effects of the coupling voltage, gap ratio, position of added mass and length ratio on the device sensitivity. Beyond the critical Duffing amplitude and while taking advantage of mode localization, it is shown that the device sensitivity in terms of amplitude ratio is significantly enhanced with up to three orders of magnitude higher than the relative shift in resonance frequencies. The proposed model can be used as a design tool to tune the nonlinearity level enabling the performance improvement of multimodal MEMS mass sensors.
机译:通过将模式定位和非线性动力学的益处组合在不同长度的两个夹紧夹紧的微沟中的益处来提出超细量传感器。两个谐振器之间的耦合静电刚度可以调节用于调节灵敏度,并且可以调节施加到较短光束的致动电压,以克服诸如几何不对称的机械缺陷。考虑二次和立方非线性的分析动态模型由渐近数值(ANM)与谐波平衡法(HBM)结合建立和解决,以及通过长时间集成(LTI)方法验证。进行参数研究以研究耦合电压,间隙比,增加质量和长度比对装置灵敏度的影响。超出临界Duffing幅度且在利用模式本地化的同时,示出了幅度比的设备灵敏度显着增强,其数量大于谐振频率的相对偏移量高达三个数量级。所提出的模型可以用作调谐非线性水平的设计工具,从而实现多式联运MEMS质量传感器的性能改进。

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  • 来源
    《International journal of non-linear mechanics》 |2020年第5期|103455.1-103455.11|共11页
  • 作者单位

    Dalian Univ Technol State Key Lab Struct Anal Ind Equipment Dalian Peoples R China;

    Dalian Univ Technol State Key Lab Struct Anal Ind Equipment Dalian Peoples R China;

    Univ Bourgogne Franche Comte FEMTO ST Inst Dept Appl Mech UMR 6174 CNRS UFC ENSMM UTBM Besancon France;

    Dalian Univ Technol State Key Lab Struct Anal Ind Equipment Dalian Peoples R China;

    China Acad Engn Phys Inst Elect Engn Mianyang Sichuan Peoples R China;

    China Acad Engn Phys Inst Elect Engn Mianyang Sichuan Peoples R China;

    Xian Technol Univ Sch Mechatron Xian Peoples R China;

    Dalian Univ Technol State Key Lab Struct Anal Ind Equipment Dalian Peoples R China|Dalian Ocean Univ Coll Ocean & Civil Engn Dalian Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Mass sensor; Mode localization; Electrostatic coupling; Nonlinear dynamics;

    机译:质量传感器;模式本地化;静电耦合;非线性动力学;

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