Cross coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection

摘要

In this contribution cross coupled beams MEMS resonator is presented in order to excite second in-plane flexural mode and provide more transduction area than a single beam in order to enhance the electrostatic signal measurement employing capacitive transduction in small resonators. Different configurations to excite the desired 250 MHz mechanical resonance are explained, given details on the fabrication process. The influence on the electrical characterization due to the dimensional tolerance of the CMOS technology employed is discussed.