摘要：Change the dimensions of the folded beams,utilize the software ANSYS ,this paper analyze the modals of different oscillating microresonators with different dimensions,then the relationship between the modal frequency and the sizes of the folded beams is gained.And then ,analyze the damp that existed in the driving combs, ratiocinate, and finally educe the damp formula, find that the width of the comb is the most significant structure parameter ,which strongly affects the quality factor,Q.Ultimately,this paper gets an conclusion that the sizes of the width of both the folded beams and driving combs are important for the Oscillating Microresonators. The modals of different oscillating microresonators with different dimensions are analyzed , at the same time, the quality factor Q is gained and analyzed .Both the modal frequncy and the quality factor Q are significant performance parameters of oscillating microresonators.And then ,run-of-mill conclusions which were about the effects of structural dinensions to performance are gained ultimately,through analizing ,comparing the emulational results.
