Nonlinear Analytical Model of Two Weakly Coupled MEMS Cantilevers for Mass Sensing Using Electrostatic Actuation

摘要

This paper presents a nonlinear analytical model of MEMS mass sensor, which is composed of two cantilevers of 98 ?μm and 100 ?μm length, 20 ?μm width and 1.3 ?μm thick. They are connected by a coupling beam and only the shortest cantilever is actuated by a combined AC-DC voltage. The DC voltage is used to equilibrate the system and the phenomenon of mode localization is investigated when a mass perturbation is applied. The sensor is modeled as a continuous system with beam theory and non-ideal boundary conditions are considered by using flexible supports. With a low AC voltage of 10 mV, a DC voltage of 5.85 V can counterbalance the length difference. This DC voltage decreases at 5.60 V when we increase the AC voltage, due to the effect of electrostatic nonlinearities. For a relative added mass of 0.1%, the amplitude change in the two cantilevers is more important when the coupling is weaker.