Non-linear mechanics in resonant inertial micro sensors Claudia Comi, Valentina Zega, Alberto Corigliano

摘要

Microsystems (or Micro Electro Mechanical Systems, MEMS) are important components of many popular products in the consumer market and are one of the enabling ingredients of incoming industrial revolutions like Industry 4.0 and Internet of Things (IoT). Behind many Microsystems there are important mechanical principles and coupling effects that must be completely mastered starting from the design phase. More sophisticated and smaller devices also imply to consider many non-linear effects that can be strictly related to the mechanical response or to coupled electro-thermo-mechanical phenomena. This paper contains an overview of key mechanical aspects in design and reliability of Microsystems with a particular focus on non-linear dynamics of oscillators in inertial sensors.