The inertial sensor on the micro mechanics in order to measure rotary speed

摘要

Being the rotary speed sensor in order as for this invention, the sensor turns for inspecting, to inspect revolution , the aforementioned sensor, in x y plane surface above the backing material, and the backing material surface, the drive - which exists substantially in plane and has inspection structure, drive - and inspection structure drive mass (4) and has inspection mass (3), being possible these, the center of inspection structure (Z) from at the interval which differs, the center (Z) to be arranged symmetrically the around, and, as for the mode of vibration, to be conveyed partly mutually,It is, and is separated partly, revolution regards the rotary speed sensor which is inspected, drive - of inspection mass and by inspecting the inclination from plane surface of inspection structure. And as for this invention, as for those the side which possesses bigger interval both mass (3 and 4) vis-a-vis inside and the aforementioned center, under influencing the Coriolis force, inclination from the aforementioned plane surface is possible, it is connected by the backing material and coupling means (7) by, because of this, return operation of the aforementioned inclination, is assisted by the aforementioned coupling means, thing is featured. By the coupling means of this invention, the sensor, strength of the constitution for the environmental action which is subordinate is improved. Selective figure Figure 2