Contact Resistance Modeling of MEMS Scanner for CMOS-MEMS Simultaneous Simulation

摘要

As an example of the advantage of CMOS-MEMS system, we present a MEMS scanning mirror combined with its control circuits. A MEMS scanner with the control circuit has been designed to oscillate at its resonance based on a phase locked loop(PLL), where the scanner has maximum amplitude. The whole system was simulated by HSpice with the simple model of MEMS scanner, and was proven that the controller automatically kept tracks on the resonant frequency. The scanner model is based on the change of piecewise linear contact resistance according to its driving signal plus RLC tank for phase delay. The scanner was fabricated by electroplating for future integration. The CMOS controller was designed by 1.2μm technology.