A Combined Mechanical and Electrical Characterization Procedure for Investigating the Dynamic Behavior of RF-MEMS Switches

摘要

This paper shows the potentialities of two characterization procedures on the electrical and mechanical characterizations of ohmic RF microelectromechanical systems (MEMS) switches. The first is a “fast electrical” procedure that uses an electrical stimulus and monitors the RF signals at the input and output ports of the switch; the second is a “fast hybrid” procedure, i.e., electrical and mechanical, with an electrical input adopted to actuate the device and a mechanical measurement conducted with an optical profilometer, which monitors the displacement and the velocity of the moving membrane when the input electrical signal is applied. Both systems are validated on cantilever and clamped–clamped resistive RF-MEMS switches. We developed these measurement procedures to speed up the measurement process and, consequently, to limit charge trapping during the characterization process. In future analyses, the procedure will be systematically applied to investigate reliability issues when the switch is subjected to multiple impacts and long-term actuation. The use of such procedures will permit separating electrical and mechanical failure mechanisms.