An Interlayer Interconnect BIST and Diagnosis Solution for Monolithic 3-D ICs

摘要

Monolithic 3-D (M3D) integration offers higher-density integration compared to 3-D integration based on through-silicon vias. Advances in testing are however needed to screen defects in M3D integration without significantly impacting manufacturing cost. We propose a built-in-self-test (BIST) solution to target shorts and opens in interlayer vias (ILVs). In the proposed solution, scan cells at the interface of two layers are stitched into a twisted-ring counter (TRC) using their functional outputs and ILVs. The interface-register cells launch and capture tests, and a test path consists of ILVs and a multiplexer. We map the problem of minimizing the length of the wires added to stitch the TRC to that of finding a minimum-cost Hamiltonian circuit in a weighted bipartite graph. Since the weighted Hamiltonian circuit problem is NP-Complete, we propose a heuristic algorithm for this problem. We also propose a framework based on artificial neural network to carry out diagnosis when a chip fails the proposed test. We show using simulations that the proposed BIST solution can detect all opens and shorts. We also show using simulations that the proposed diagnosis framework can accurately estimate the size of defects in ILVs.