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Strained-layer InGaAs-GaAs-InGaP buried-heterostructure quantum-well lasers on a low-composition InGaAs substrate by selective-area MOCVD

机译:通过选择性区域MOCVD在低成分InGaAs衬底上的应变层InGaAs-GaAs-InGaP埋入异质结构量子阱激光器

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摘要

Aluminum-free buried-heterostructure quantum-well lasers have been successfully fabricated on low-composition InGaAs substrates. Selective-area metalorganic chemical vapor deposition (MOCVD) was utilized to investigate a variety of InGaAs quantum wells with a wide range of composition and thickness. Compressively strained quantum wells can be deposited thicker on substrates of InGaAs than GaAs before the generation of misfit dislocations. These deeper potential wells enable laser diodes with longer wavelengths (1.1504 /spl mu/m) than GaAs-based emitters and higher characteristic temperatures (145 K) than InP-based devices.
机译:已经成功地在低成分InGaAs衬底上制造了无铝掩埋异质结构量子阱激光器。选择性区域金属有机化学气相沉积(MOCVD)用于研究各种InGaAs量子阱,其组成和厚度范围广。在产生失配位错之前,压缩应变量子阱可以比GaAs沉积更厚的InGaAs衬底。与基于GaAs的发射器相比,这些更深的势阱使激光二极管具有更长的波长(1.1504 / spl mu / m)和比基于InP的器件更高的特征温度(145 K)。

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