High-voltage smart power integrated circuits to drive piezoceramicactuators for microrobotic applications

摘要

The development of microrobots is very important in fields wherensub-micrometre precision is required. An integrated driving solutionnbased on a commercial BCD (bipolar, CMOS, DMOS) technology is proposednto implement proper drivers for microrobots formed by smartnpiezoactuator units (SPU). The high voltage signals that demand thesenactuators are performed by a driver based on a full custom design of anhigh voltage operational amplifier connected in the inverternconfiguration. They are able to supply a 50 V sinusoidal waveform atnfrequencies ranging about 10 kHz with the distortion levels appropriatento the application