Innovation in ceramic material technologies for semiconductor manufacturing

摘要

Ceramic materials are well-established in the global semiconductor manufacturing sector, where their unique physical and performance attributes deliver real commercial benefit for manufacturers and their sub-contractors. Graphite has been used in processing for at least 35 years, while other materials such as pyrolitic boron nitride (PBN) and Silicon Carbide (SiC) are also well established, having been employed in the sector for at least 25 years and 15 years respectively. Their combination of purity, resistance to thermal shock and chemical resistance mean they are ideally suited to the unique requirements of this process. Despite their effectiveness, further innovation in ceramic-based materials is being driven by the need to reduce cycle times and reject rates, extracting maximum value from capital equipment in a sector which is becoming more and more competitive.