首页> 外国专利> Flat type plasma diagnostic apparatusWafer type plasma diagnostic equipment equipped with planar plasma diagnostic equipmentAn electrostatic chuck embedded in a planar plasma diagnostic system. This research is a material innovation program (NRF) material innovation program (1711120490 / 2020m3h4a3106004), which is supported by the science and technology information and communications department.Contribution is 51)Korea National Science and Technology Research Association (NST) R D Confederation program (1711062007 / cap-17-02-nfri-01)AndIt was supported by Kriss.

Flat type plasma diagnostic apparatusWafer type plasma diagnostic equipment equipped with planar plasma diagnostic equipmentAn electrostatic chuck embedded in a planar plasma diagnostic system. This research is a material innovation program (NRF) material innovation program (1711120490 / 2020m3h4a3106004), which is supported by the science and technology information and communications department.Contribution is 51)Korea National Science and Technology Research Association (NST) R D Confederation program (1711062007 / cap-17-02-nfri-01)AndIt was supported by Kriss.

机译:扁平型等离子诊断设备件型等离子诊断设备,配备平面等离子诊断设备静电卡盘嵌入平面等离子体诊断系统中。 本研究是一种材料创新计划(NRF)材料创新计划(1711120490 / 2020M34A3106004),由科学和技术信息和通信部门提供支持。委托为51%)韩国国家科技研究协会(NST)研发 同盟计划(1711062007 / CAP-17-02-NFRI-01)由Kriss支持。

摘要

The present invention relates to a planar plasma diagnostic apparatus.A transmission antenna for applying a microwave with a variable frequency to the plasma;A receiving antenna receiving said microwave from said plasma;A fuselage surrounding the transmit antenna and the receiving antenna to be insulated from each other;IncludingThe upper surface to which the microwave of the transmitting antenna is applied and the upper surface for receiving the microwave of the receiving antenna are planarThe transmitting antenna and the side surface of the upper surface of the receiving antenna are opposed to each other.Diagram
机译:平面等离子体诊断设备技术领域 彼此;包括施加透射天线的微波的上表面并且用于接收接收天线的微波的上表面是平面的传输天线,并且接收天线的上表面的侧表面彼此相对。 图表

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